EEET 4047 EEET 4047 Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS Introduction to MEMS – Homework Homework HomeworkHomework 3 Handed out Tuesday, April 9, 2013. Due Tuesday, May 7, 2013. 50 points (out of 200 total) Problem 0 (Project Design Specification) 10 points Based on your project proposal and the feedback from the course instructor, generate a brief document that describes the specific goals of your project. Maximum length 1 page! This document should summarize your “deliverables,” i.e., it should list all the important things you want to achieve by the final deadline. Please be as (a) specific, (b) ambitious, and (c) realistic as possible: (a) the clearer the plans and goals, the better; (b) try to aim high; (c) don’t promise too much. At the end of the project, we will compare this document with your final project summary. Here is some information that should be included (if applicable): 1. System architecture: show the different building blocks or modules of your proposed system or device. How are these modules related? How does material, energy, of information flow between them? … 2. System parameters: describe basic features and values. What are the input and output parameters (e.g., size, mass, voltage, pressure, frequency, …). 3. Performance specification: what will the system achieve? How well is it expected to perform? Give specific numbers (e.g., max. frequency, response time, throughput, …), or give comparisons with other, existing systems. Note: this document will be very different from the project proposal. While the proposal was about the ‘what?’ and ‘why?’, this document is concerned with the ‘how?’. Problem 2 (MUMPs Cross Sections) 15 points Here is a comb drive mask layout (top view) for the MUMPs process. The suspended structure is made only of Poly1. a. Show the process sequence…